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Semiconductor Modular Cleanroom
Due to the sensitive nature of their products, clean room facilities for microelectronic and semiconductor applications require stringent environmental controls.
These clean rooms also house extremely precise and expensive equipment such as photolithography, etching, cleaning, doping, and dicing machines.
Hence, any deficiencies in the cleanliness specifications can affect the entire production process. Other common issues in microelectronic & semiconductor
clean room conception and design are the maximizing of space while also enabling future reconfiguration. For all these reasons, a modular clean room system is often the optimal solution
Haoairtech semiconductor cleanrooms comply with your requirements for the following:airtightnessUV filtered lightnon-retention of particlesnon-proliferation of contaminating agents
For some applications, the cleanroom must also comply with specifications associated with electrostatic charges or discharges (ESD compatibility).
Electrostatics can cause product contamination, product damage from electrostatic discharge (ESD) and production equipment malfunction caused
by ESD-generated electromagnetic interference (EMI). Mecart galvanized steel panels are ESD compliant.
Controlling temperature and humidity is critical to minimize static electricity. haoairtech’s cleanrooms can use high precision humidity (up to ±2%) and temperature (up to ±0.25°C) co
|External Size (W*D*H)||1500*2000*2530mm||2000*3000*2530mm||3000*4000*2530mm||5000*5000*2530mm|
|HEPA Filters||99.999% efficiency at 0.3 um|
|FFU Nos.||4 pcs||6 pcs||12 pcs||25 pcs|
|Clean Level||ISO 5 (Class 100), Class A|
|Control System||control box|
|Rectangular Tube Material||SUS 304 material frame|
|Wall Material||Anti-static dustproof curtain|
|Blower||Built-in centrifugal blower; speed adjustable|
|UV Lamp||Emission of 253.7nanometers, with UV timer|
|Air Velocity||0.1~0.6m/s, average 0.45m/s|
|Power Supply||AC220V±10%, 50/60Hz; 110V±10%, 60Hz|
|Package Size (W*D*H)|
|Customized design for clean level, size or material is available|
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