Why does the FAB clean room have to control humidity?
2020-05-28
Why does the FAB clean room have to control humidity?
Humidity is a common environmental control condition in the operation of cleanrooms. The target value of relative humidity in the semiconductor clean room is controlled to be in the range of 30 to 50%, allowing the error to be within a narrow range of ±1%, such as a photolithographic area - or even smaller in the far ultraviolet processing (DUV) area. - In other places, you can relax to within ±5%.